A comprehensive guide to MEMS engineering, fabrication, and applications This hands-on engineering textbook shows, step by step, how to apply cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality. The book features complete explanations of microfabrication, micromachining, transduction principles including piezoelectricity and piezoresistivity, sensors, actuators, resonators, and much more. Written by an experienced educator, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest methods with many illustrative figures and includes accompanying in-depth questions and problems that reinforce key topics. \n\nMiniature and sub-miniature transducers, Film Bulk Acoustic Resonator (FBAR) filters and oscillators, and vibration energy harvesting are discussed. Readers will take a look at the future MEMS workforce and explore MEMS research and development. \n1. Covers all the fundamentals for design, fabrication, and characterization \n2. Includes extensive problem sets for reinforced learning \n3. Written by an industry-recognized expert and experienced academician