Integrated Circuit Technology

  • Format:

• Introduction to IC Technology \n• Silicon Wafer Preparation \n• Epitaxy Process \n• Oxidation \n• Lithography \n• Etching \n• Dielectric and Polysilicon Film Deposition \n• Diffusion \n• Ion Implantation \n• Metallization \n• Assembly Techniques and Packing \n• VLSI Process Integration \n• Model Paper \n• Index. \n\n

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