• Introduction to VLSI Technology \n• Film Deposition \n• Epitaxy Process \n• Diffusion Process \n• Ion Implantation \n• Lithography \n• Photoresist and Etching \n• MOSFET and MOS Fabrication Technology \n• Simulation Process (IC Fabrication Steps) \n• Bipolar IC Technology \n• Appendices \n• Examination Paper \n• Index. \n\n
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